The modern history of pressure sensors

In all kinds of sensors in the pressure sensor with small volume, light weight, high sensitivity, stable and reliable, low cost, easy to integration advantages, can be widely used in pressure, height, acceleration, the flow of fluid, flow, liquid level, pressure measurement and control. In addition, also widely used in water conservancy, geology, meteorology, chemical, medical and health care, etc. Because the technology is planar process combined with three-dimensional processing, and convenient for integration, and so can be used to make blood pressure, wind speed meter, water meter and pressure gauge, electronic and automatic alarm device, etc. Technology is the most mature of the pressure sensor has become all kinds of sensors, the most stable performance, the highest ratio of a class of sensor. So for is engaged in the modern measurement and automatic control of professional technical personnel must understand and familiar with the research status and development trend of the pressure sensor at home and abroad. Modern pressure sensor is marked by the invention of the semiconductor sensor, which can be divided into four stages of development of the semiconductor sensor, we followed the instrument and meter plant to see what are the four stages: stage 1 invention ( 1945 - 1960) This stage mainly in 1947 marked the invention of the bipolar transistor. Since then, get more extensive application characteristics of the semiconductor material. Smith, C。 年代。 史密斯) In 1945 and found the piezoresistive effect of silicon and germanium, namely when has the external force ACTS on the semiconductor material, its resistance will change obviously. According to the principle of pressure sensor made of resistance strain slice is glued on the metal film, measure the force signal into electrical signal. At this stage the minimum size is about 1 cm. Stage 2 ( 1960 - 1970) With the development of silicon diffusion technology, technical personnel in silicon ( 001). Or ( 110). To choose the appropriate crystal crystal to spread the strain resistance on the crystal face directly, and then at the back into concave, to form a thin silicon elastic diaphragm, known as the silicon cup. This form of silicon cup sensor with small volume, light weight, high sensitivity, good stability, low cost, easy to integrated the advantages of metal - was realized Silicon eutectic, offers the potential for commercial development. 3 commercialization stage ( 1970 - 1980) In the silicon cup diffusion theory on the basis of application of silicon anisotropic etching technology, its processing technology diffusion silicon sensor with each different erosion of silicon technology is given priority to, can become automatic control silicon film thickness of silicon anisotropic processing technology, the main method of V groove, thick boron automatic suspension method, anodic oxidation method, automatic suspension method and microcomputer control automatic suspension method. Due to the corrosion can be in multiple surface simultaneously, thousands of silicon pressure membrane can be produced at the same time, has realized the integration of factory processing mode, further reduce the cost. 4 the mechanical processing stage ( 1980 - ） The end of last century the emergence of nanotechnology, making it possible to micro mechanical processing technology. Through the machining process can be controlled by computer processing of structural stress sensor, which affects its can control within the scope of the micron level. Use of this technology can be processed, etching micron level ditch, article, membrane, makes the pressure sensor has entered the phase of micron. Integrated circuits (MEMS pressure sensor can use similar IC) Design technology and manufacturing process, high precision, low cost of mass production, to consumer electronics and is widely used in industrial process control products with low cost MEMS sensors to open the door, make the pressure become simple and easy to use and intelligent control. Pressure sensor is based on traditional mechanical quantity of metal elastomer mechanical deformation, elastic deformation of mechanical quantity to output power conversion, thus it can not be so done such as MEMS pressure sensor as tiny as IC, cost is far higher than that of MEMS pressure sensor. Compared with traditional mechanical quantity sensor, MEMS pressure sensor size smaller, maximum of not more than 1 cm, make cost performance compared with traditional & other; Mechanical & throughout; Greatly improve manufacturing technology. The future trend of the development of the world's countries to pressure sensor research field is very wide, almost permeated all walks of life, but the sum up basically has the following several trends, as Katie instrument equipment factory again to see: 1 miniaturization of miniaturization of the current market demand for small pressure sensor is more and more big, the small sensors can work in extreme conditions, and require little maintenance and maintenance, the impact on the surrounding environment are also small, can be placed in each important organs in the body's gathering information, does not affect the normal life of people. Such as the United States Entran range is 2 ~ 500 psi sensor, the diameter is only 1. 27 mm, can be placed in the body's blood vessels without big influence on the circulation of blood. 2 integrated integrated pressure sensor has been more and more with other measuring sensor is integrated to form a measurement and control system. In the process control and factory automation integrated system can improve the operation speed and efficiency. 3 intelligent intelligent due to the emergence of integrated can add some processors in the integrated circuit, the sensor with automatic compensation, communication, self-diagnosis, logic, and other functions. 4 style style is another development tendency of pressure sensor is from machinery industry to expand in other fields, such as: automotive components, medical equipment, and energy and environment control system. Five standardized standardized sensor design and manufacturing has formed a certain industry standards.
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